Lace, a startup backed by Microsoft, has raised $40 million to build chipmaking equipment based on helium atom beam lithography, a technique that could etch circuit designs 10 times smaller than ...

MONTEREY, Calif. — Hoping to take a lead in the next-generation lithography (NGL) race, Japan's Nikon Corp. today announced what appears to be the world's first photomask blank for exposure tools ...

August 26, 2014. Today, KLA-Tencor Corp. introduced the WaferSight PWG patterned wafer geometry measurement system, the LMS IPRO6 reticle pattern placement metrology system and the K-T Analyzer 9.0 ...

Nearly 10 years ago, the industry rolled out a potentially disruptive technique called inverse lithography technology (ILT). But ILT was ahead of its time, causing the industry to push out the ...

To view the multimedia assets associated with this release, please click: http://www.multivu.com/players/English/7065552-kla-tencor-wafersight-5d-patterning-control ...

After many years of hearing that EUV is almost ready for prime time, the tide is finally coming in. A decade of slow but steady progress has resulted in exposure tools that can expose on the order of ...

Modern photolithography machines must deliver extraordinary precision on a repeatable basis, and in high volume production. In response to demands for increased throughput in the semiconductor ...

BILLERICA, Mass.--(BUSINESS WIRE)--Entegris, Inc. (NASDAQ: ENTG), a leader in specialty chemicals and advanced materials solutions for the microelectronics industry, today released the next generation ...

Applied Materials, Inc. advanced the state-of-the art in photomask technology with its new Applied Centura Tetra EUV Advanced Reticle Etch system. Overcoming a major hurdle to the adoption of EUV ...

The license agreements resolve disputes related to reticle pod technology Entegris provides advanced materials and process solutions to the semiconductor and other high-technology industries. (Credit: ...

BILLERICA, Mass.--(BUSINESS WIRE)--Entegris, Inc. (NASDAQ: ENTG), a world-class supplier of advanced materials and process solutions for the semiconductor and other high-technology industries, ...